7/15/2010	9:22:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2010	9:22:18 AM	Recipe started at 9:22 AM
7/15/2010	9:22:18 AM	H2 valve closed
7/15/2010	9:22:18 AM	BCl3 valve closed
7/15/2010	9:22:18 AM	PH3 valve closed
7/15/2010	9:22:18 AM	SiCl4 pre valve closed
7/15/2010	9:22:18 AM	SiCl4 post valve closed
7/15/2010	9:22:18 AM	Main Vac valve closed
7/15/2010	9:22:18 AM	Bypass valve closed
7/15/2010	9:22:18 AM	Bubbler valve closed
7/15/2010	9:22:18 AM	Helium valve opened
7/15/2010	9:22:18 AM	Helium MFC set to  500.000000
7/15/2010	9:22:18 AM	H2 MFC set to  0.000000
7/15/2010	9:22:18 AM	BCl3 MFC set to  0.000000
7/15/2010	9:22:18 AM	PHl3 MFC set to  0.000000
7/15/2010	9:22:18 AM	SiCl4 MFC set to  0.000000
7/15/2010	9:22:18 AM	Bypass solenoid MFC set to  0.000000
7/15/2010	9:22:18 AM	Tube furnace set to 0
7/15/2010	9:23:38 AM	Helium valve closed
7/15/2010	9:23:38 AM	H2 valve closed
7/15/2010	9:23:38 AM	BCl3 valve closed
7/15/2010	9:23:38 AM	PH3 valve closed
7/15/2010	9:23:38 AM	SiCl4 pre valve closed
7/15/2010	9:23:38 AM	SiCl4 post valve closed
7/15/2010	9:23:38 AM	Main Vac valve closed
7/15/2010	9:23:38 AM	Bypass valve closed
7/15/2010	9:23:38 AM	Bubbler valve closed
7/15/2010	9:23:38 AM	Helium MFC set to  0.000000
7/15/2010	9:23:38 AM	H2 MFC set to  0.000000
7/15/2010	9:23:38 AM	BCl3 MFC set to  0.000000
7/15/2010	9:23:38 AM	PHl3 MFC set to  0.000000
7/15/2010	9:23:38 AM	SiCl4 MFC set to  0.000000
7/15/2010	9:23:38 AM	Bypass solenoid MFC set to  0.000000
7/15/2010	9:23:39 AM	Tube furnace set to 0
7/15/2010	9:23:39 AM	Run finished at 9:23 AM
7/15/2010	9:23:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2010	9:30:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2010	9:30:01 AM	Recipe started at 9:30 AM
7/15/2010	9:30:01 AM	Helium valve closed
7/15/2010	9:30:01 AM	H2 valve closed
7/15/2010	9:30:01 AM	BCl3 valve closed
7/15/2010	9:30:01 AM	PH3 valve closed
7/15/2010	9:30:01 AM	SiCl4 pre valve closed
7/15/2010	9:30:01 AM	SiCl4 post valve closed
7/15/2010	9:30:01 AM	Main Vac valve closed
7/15/2010	9:30:01 AM	Bubbler valve closed
7/15/2010	9:30:01 AM	Bypass valve opened
7/15/2010	9:30:01 AM	Helium MFC set to  0.000000
7/15/2010	9:30:01 AM	H2 MFC set to  0.000000
7/15/2010	9:30:01 AM	BCl3 MFC set to  0.000000
7/15/2010	9:30:01 AM	PHl3 MFC set to  0.000000
7/15/2010	9:30:01 AM	SiCl4 MFC set to  0.000000
7/15/2010	9:30:01 AM	Bypass solenoid MFC set to  0.000000
7/15/2010	9:30:01 AM	Tube furnace set to 0
7/15/2010	9:30:35 AM	Helium valve closed
7/15/2010	9:30:35 AM	H2 valve closed
7/15/2010	9:30:35 AM	BCl3 valve closed
7/15/2010	9:30:35 AM	PH3 valve closed
7/15/2010	9:30:35 AM	SiCl4 pre valve closed
7/15/2010	9:30:35 AM	SiCl4 post valve closed
7/15/2010	9:30:35 AM	Bubbler valve closed
7/15/2010	9:30:35 AM	Main Vac valve opened
7/15/2010	9:30:35 AM	Bypass valve opened
7/15/2010	9:30:35 AM	Helium MFC set to  0.000000
7/15/2010	9:30:35 AM	H2 MFC set to  0.000000
7/15/2010	9:30:35 AM	BCl3 MFC set to  0.000000
7/15/2010	9:30:35 AM	PHl3 MFC set to  0.000000
7/15/2010	9:30:35 AM	SiCl4 MFC set to  0.000000
7/15/2010	9:30:35 AM	Bypass solenoid MFC set to  0.000000
7/15/2010	9:30:35 AM	Tube furnace set to 0
7/15/2010	9:30:35 AM	Run finished at 9:30 AM
7/15/2010	9:30:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2010	9:31:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/15/2010	9:31:19 AM	Recipe started at 9:31 AM
7/15/2010	9:31:19 AM	Helium valve closed
7/15/2010	9:31:19 AM	H2 valve closed
7/15/2010	9:31:19 AM	BCl3 valve closed
7/15/2010	9:31:19 AM	PH3 valve closed
7/15/2010	9:31:19 AM	SiCl4 pre valve closed
7/15/2010	9:31:19 AM	SiCl4 post valve closed
7/15/2010	9:31:19 AM	Main Vac valve closed
7/15/2010	9:31:19 AM	Bubbler valve closed
7/15/2010	9:31:19 AM	Bypass valve opened
7/15/2010	9:31:19 AM	Helium MFC set to  0.000000
7/15/2010	9:31:19 AM	H2 MFC set to  0.000000
7/15/2010	9:31:19 AM	BCl3 MFC set to  0.000000
7/15/2010	9:31:19 AM	PHl3 MFC set to  0.000000
7/15/2010	9:31:19 AM	SiCl4 MFC set to  0.000000
7/15/2010	9:31:19 AM	Bypass solenoid MFC set to  0.000000
7/15/2010	9:31:19 AM	Tube furnace set to 0
7/15/2010	9:31:19 AM	Helium valve closed
7/15/2010	9:31:19 AM	H2 valve closed
7/15/2010	9:31:19 AM	BCl3 valve closed
7/15/2010	9:31:19 AM	PH3 valve closed
7/15/2010	9:31:19 AM	SiCl4 pre valve closed
7/15/2010	9:31:19 AM	SiCl4 post valve closed
7/15/2010	9:31:19 AM	Bubbler valve closed
7/15/2010	9:31:19 AM	Main Vac valve opened
7/15/2010	9:31:19 AM	Bypass valve opened
7/15/2010	9:31:19 AM	Helium MFC set to  0.000000
7/15/2010	9:31:19 AM	H2 MFC set to  0.000000
7/15/2010	9:31:19 AM	BCl3 MFC set to  0.000000
7/15/2010	9:31:19 AM	PHl3 MFC set to  0.000000
7/15/2010	9:31:19 AM	SiCl4 MFC set to  0.000000
7/15/2010	9:31:19 AM	Bypass solenoid MFC set to  0.000000
7/15/2010	9:31:19 AM	Tube furnace set to 0
7/15/2010	9:32:19 AM	H2 valve closed
7/15/2010	9:32:19 AM	BCl3 valve closed
7/15/2010	9:32:19 AM	PH3 valve closed
7/15/2010	9:32:19 AM	SiCl4 pre valve closed
7/15/2010	9:32:19 AM	SiCl4 post valve closed
7/15/2010	9:32:19 AM	Bubbler valve closed
7/15/2010	9:32:19 AM	Helium valve opened
7/15/2010	9:32:19 AM	Main Vac valve opened
7/15/2010	9:32:19 AM	Bypass valve opened
7/15/2010	9:32:19 AM	Helium MFC set to  100.000000
7/15/2010	9:32:19 AM	H2 MFC set to  0.000000
7/15/2010	9:32:19 AM	BCl3 MFC set to  0.000000
7/15/2010	9:32:19 AM	PHl3 MFC set to  0.000000
7/15/2010	9:32:19 AM	SiCl4 MFC set to  0.000000
7/15/2010	9:32:19 AM	Bypass solenoid MFC set to  0.000000
7/15/2010	9:32:19 AM	Tube furnace set to 0
7/15/2010	9:41:19 AM	Helium valve closed
7/15/2010	9:41:19 AM	H2 valve closed
7/15/2010	9:41:19 AM	BCl3 valve closed
7/15/2010	9:41:19 AM	PH3 valve closed
7/15/2010	9:41:19 AM	SiCl4 pre valve closed
7/15/2010	9:41:19 AM	SiCl4 post valve closed
7/15/2010	9:41:19 AM	Bubbler valve closed
7/15/2010	9:41:19 AM	Main Vac valve opened
7/15/2010	9:41:19 AM	Bypass valve opened
7/15/2010	9:41:19 AM	Helium MFC set to  0.000000
7/15/2010	9:41:19 AM	H2 MFC set to  0.000000
7/15/2010	9:41:19 AM	BCl3 MFC set to  0.000000
7/15/2010	9:41:19 AM	PHl3 MFC set to  0.000000
7/15/2010	9:41:19 AM	SiCl4 MFC set to  0.000000
7/15/2010	9:41:19 AM	Bypass solenoid MFC set to  0.000000
7/15/2010	9:41:20 AM	Tube furnace set to 0
7/15/2010	9:42:20 AM	H2 valve closed
7/15/2010	9:42:20 AM	BCl3 valve closed
7/15/2010	9:42:20 AM	PH3 valve closed
7/15/2010	9:42:20 AM	SiCl4 pre valve closed
7/15/2010	9:42:20 AM	SiCl4 post valve closed
7/15/2010	9:42:20 AM	Bubbler valve closed
7/15/2010	9:42:20 AM	Helium valve opened
7/15/2010	9:42:20 AM	Main Vac valve opened
7/15/2010	9:42:20 AM	Bypass valve opened
7/15/2010	9:42:20 AM	Helium MFC set to  100.000000
7/15/2010	9:42:20 AM	H2 MFC set to  0.000000
7/15/2010	9:42:20 AM	BCl3 MFC set to  0.000000
7/15/2010	9:42:20 AM	PHl3 MFC set to  0.000000
7/15/2010	9:42:20 AM	SiCl4 MFC set to  0.000000
7/15/2010	9:42:20 AM	Bypass solenoid MFC set to  0.000000
7/15/2010	9:42:20 AM	Tube furnace set to 0
7/15/2010	9:51:20 AM	Helium valve closed
7/15/2010	9:51:20 AM	H2 valve closed
7/15/2010	9:51:20 AM	BCl3 valve closed
7/15/2010	9:51:20 AM	PH3 valve closed
7/15/2010	9:51:20 AM	SiCl4 pre valve closed
7/15/2010	9:51:20 AM	SiCl4 post valve closed
7/15/2010	9:51:20 AM	Bubbler valve closed
7/15/2010	9:51:20 AM	Main Vac valve opened
7/15/2010	9:51:20 AM	Bypass valve opened
7/15/2010	9:51:20 AM	Helium MFC set to  0.000000
7/15/2010	9:51:20 AM	H2 MFC set to  0.000000
7/15/2010	9:51:20 AM	BCl3 MFC set to  0.000000
7/15/2010	9:51:20 AM	PHl3 MFC set to  0.000000
7/15/2010	9:51:20 AM	SiCl4 MFC set to  0.000000
7/15/2010	9:51:20 AM	Bypass solenoid MFC set to  0.000000
7/15/2010	9:51:20 AM	Tube furnace set to 0
7/15/2010	9:52:20 AM	H2 valve closed
7/15/2010	9:52:20 AM	BCl3 valve closed
7/15/2010	9:52:20 AM	PH3 valve closed
7/15/2010	9:52:20 AM	SiCl4 pre valve closed
7/15/2010	9:52:20 AM	SiCl4 post valve closed
7/15/2010	9:52:20 AM	Bubbler valve closed
7/15/2010	9:52:20 AM	Helium valve opened
7/15/2010	9:52:20 AM	Main Vac valve opened
7/15/2010	9:52:20 AM	Bypass valve opened
7/15/2010	9:52:20 AM	Helium MFC set to  100.000000
7/15/2010	9:52:20 AM	H2 MFC set to  0.000000
7/15/2010	9:52:20 AM	BCl3 MFC set to  0.000000
7/15/2010	9:52:20 AM	PHl3 MFC set to  0.000000
7/15/2010	9:52:20 AM	SiCl4 MFC set to  0.000000
7/15/2010	9:52:20 AM	Bypass solenoid MFC set to  0.000000
7/15/2010	9:52:20 AM	Tube furnace set to 0
7/15/2010	10:01:20 AM	Helium valve closed
7/15/2010	10:01:20 AM	H2 valve closed
7/15/2010	10:01:20 AM	BCl3 valve closed
7/15/2010	10:01:20 AM	PH3 valve closed
7/15/2010	10:01:20 AM	SiCl4 pre valve closed
7/15/2010	10:01:20 AM	SiCl4 post valve closed
7/15/2010	10:01:20 AM	Bubbler valve closed
7/15/2010	10:01:20 AM	Main Vac valve opened
7/15/2010	10:01:20 AM	Bypass valve opened
7/15/2010	10:01:20 AM	Helium MFC set to  0.000000
7/15/2010	10:01:20 AM	H2 MFC set to  0.000000
7/15/2010	10:01:20 AM	BCl3 MFC set to  0.000000
7/15/2010	10:01:20 AM	PHl3 MFC set to  0.000000
7/15/2010	10:01:20 AM	SiCl4 MFC set to  0.000000
7/15/2010	10:01:20 AM	Bypass solenoid MFC set to  0.000000
7/15/2010	10:01:20 AM	Tube furnace set to 0
7/15/2010	10:01:21 AM	Run finished at 10:01 AM
7/15/2010	10:01:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/15/2010	10:21:15 AM	Bypass valve closed
7/15/2010	10:21:18 AM	Bypass valve opened
7/15/2010	10:21:35 AM	Main Vac valve closed
7/15/2010	10:21:36 AM	Bypass valve closed
7/15/2010	10:21:44 AM	Main Vac valve opened
7/15/2010	10:21:45 AM	Bypass valve opened
7/15/2010	10:22:00 AM	Recipe started at 10:21 AM
7/15/2010	10:22:00 AM	Helium valve closed
7/15/2010	10:22:00 AM	BCl3 valve closed
7/15/2010	10:22:00 AM	PH3 valve closed
7/15/2010	10:22:00 AM	SiCl4 pre valve closed
7/15/2010	10:22:00 AM	SiCl4 post valve closed
7/15/2010	10:22:00 AM	Main Vac valve closed
7/15/2010	10:22:00 AM	Bypass valve closed
7/15/2010	10:22:00 AM	Bubbler valve closed
7/15/2010	10:22:00 AM	H2 valve opened
7/15/2010	10:22:00 AM	Helium MFC set to  0.000000
7/15/2010	10:22:00 AM	H2 MFC set to  500.000000
7/15/2010	10:22:00 AM	BCl3 MFC set to  0.000000
7/15/2010	10:22:00 AM	PHl3 MFC set to  0.000000
7/15/2010	10:22:00 AM	SiCl4 MFC set to  0.000000
7/15/2010	10:22:00 AM	Bypass solenoid MFC set to  0.000000
7/15/2010	10:22:00 AM	Tube furnace set to 0
7/15/2010	10:23:13 AM	Run aborted at 10:23 AM
7/15/2010	10:23:13 AM	Helium valve closed
7/15/2010	10:23:13 AM	H2 valve closed
7/15/2010	10:23:13 AM	BCl3 valve closed
7/15/2010	10:23:13 AM	PH3 valve closed
7/15/2010	10:23:13 AM	SiCl4 pre valve closed
7/15/2010	10:23:13 AM	SiCl4 post valve closed
7/15/2010	10:23:13 AM	Bypass valve closed
7/15/2010	10:23:13 AM	Main Vac valve closed
7/15/2010	10:23:13 AM	Bubbler valve closed
7/15/2010	10:23:13 AM	Helium MFC set to  0.000000
7/15/2010	10:23:13 AM	H2 MFC set to  0.000000
7/15/2010	10:23:13 AM	BCl3 MFC set to  0.000000
7/15/2010	10:23:13 AM	PHl3 MFC set to  0.000000
7/15/2010	10:23:13 AM	SiCl4 MFC set to  0.000000
7/15/2010	10:23:13 AM	Tube furnace set to 0
7/15/2010	10:24:10 AM	Recipe started at 10:24 AM
7/15/2010	10:24:10 AM	Helium valve closed
7/15/2010	10:24:10 AM	BCl3 valve closed
7/15/2010	10:24:10 AM	PH3 valve closed
7/15/2010	10:24:10 AM	SiCl4 pre valve closed
7/15/2010	10:24:10 AM	SiCl4 post valve closed
7/15/2010	10:24:10 AM	Main Vac valve closed
7/15/2010	10:24:10 AM	Bypass valve closed
7/15/2010	10:24:10 AM	Bubbler valve closed
7/15/2010	10:24:10 AM	H2 valve opened
7/15/2010	10:24:10 AM	Helium MFC set to  0.000000
7/15/2010	10:24:10 AM	H2 MFC set to  500.000000
7/15/2010	10:24:10 AM	BCl3 MFC set to  0.000000
7/15/2010	10:24:10 AM	PHl3 MFC set to  0.000000
7/15/2010	10:24:10 AM	SiCl4 MFC set to  0.000000
7/15/2010	10:24:10 AM	Bypass solenoid MFC set to  0.000000
7/15/2010	10:24:10 AM	Tube furnace set to 0
7/15/2010	10:24:20 AM	Helium valve closed
7/15/2010	10:24:20 AM	BCl3 valve closed
7/15/2010	10:24:20 AM	PH3 valve closed
7/15/2010	10:24:20 AM	SiCl4 pre valve closed
7/15/2010	10:24:20 AM	SiCl4 post valve closed
7/15/2010	10:24:20 AM	Main Vac valve closed
7/15/2010	10:24:20 AM	Bypass valve closed
7/15/2010	10:24:20 AM	H2 valve opened
7/15/2010	10:24:20 AM	Bubbler valve opened
7/15/2010	10:24:20 AM	Helium MFC set to  0.000000
7/15/2010	10:24:20 AM	H2 MFC set to  500.000000
7/15/2010	10:24:20 AM	BCl3 MFC set to  0.000000
7/15/2010	10:24:20 AM	PHl3 MFC set to  0.000000
7/15/2010	10:24:20 AM	SiCl4 MFC set to  0.000000
7/15/2010	10:24:20 AM	Bypass solenoid MFC set to  0.000000
7/15/2010	10:24:20 AM	Tube furnace set to 1000
7/15/2010	10:44:20 AM	Helium valve closed
7/15/2010	10:44:20 AM	PH3 valve closed
7/15/2010	10:44:20 AM	Main Vac valve closed
7/15/2010	10:44:20 AM	Bypass valve closed
7/15/2010	10:44:20 AM	H2 valve opened
7/15/2010	10:44:20 AM	BCl3 valve opened
7/15/2010	10:44:20 AM	SiCl4 pre valve opened
7/15/2010	10:44:20 AM	SiCl4 post valve opened
7/15/2010	10:44:20 AM	Bubbler valve opened
7/15/2010	10:44:20 AM	Helium MFC set to  0.000000
7/15/2010	10:44:20 AM	H2 MFC set to  500.000000
7/15/2010	10:44:20 AM	BCl3 MFC set to  15.000000
7/15/2010	10:44:20 AM	PHl3 MFC set to  0.000000
7/15/2010	10:44:20 AM	SiCl4 MFC set to  50.000000
7/15/2010	10:44:20 AM	Bypass solenoid MFC set to  0.000000
7/15/2010	10:44:20 AM	Tube furnace set to 1000
7/15/2010	10:54:20 AM	H2 valve closed
7/15/2010	10:54:20 AM	BCl3 valve closed
7/15/2010	10:54:20 AM	PH3 valve closed
7/15/2010	10:54:20 AM	SiCl4 pre valve closed
7/15/2010	10:54:20 AM	SiCl4 post valve closed
7/15/2010	10:54:20 AM	Main Vac valve closed
7/15/2010	10:54:20 AM	Bypass valve closed
7/15/2010	10:54:20 AM	Helium valve opened
7/15/2010	10:54:20 AM	Bubbler valve opened
7/15/2010	10:54:20 AM	Helium MFC set to  500.000000
7/15/2010	10:54:20 AM	H2 MFC set to  0.000000
7/15/2010	10:54:20 AM	BCl3 MFC set to  0.000000
7/15/2010	10:54:20 AM	PHl3 MFC set to  0.000000
7/15/2010	10:54:20 AM	SiCl4 MFC set to  0.000000
7/15/2010	10:54:20 AM	Bypass solenoid MFC set to  0.000000
7/15/2010	10:54:20 AM	Tube furnace set to 0
7/15/2010	11:14:20 AM	Helium valve closed
7/15/2010	11:14:20 AM	H2 valve closed
7/15/2010	11:14:20 AM	BCl3 valve closed
7/15/2010	11:14:20 AM	PH3 valve closed
7/15/2010	11:14:20 AM	SiCl4 pre valve closed
7/15/2010	11:14:20 AM	SiCl4 post valve closed
7/15/2010	11:14:20 AM	Main Vac valve closed
7/15/2010	11:14:20 AM	Bypass valve closed
7/15/2010	11:14:20 AM	Bubbler valve closed
7/15/2010	11:14:20 AM	Helium MFC set to  0.000000
7/15/2010	11:14:20 AM	H2 MFC set to  0.000000
7/15/2010	11:14:20 AM	BCl3 MFC set to  0.000000
7/15/2010	11:14:20 AM	PHl3 MFC set to  0.000000
7/15/2010	11:14:20 AM	SiCl4 MFC set to  0.000000
7/15/2010	11:14:20 AM	Bypass solenoid MFC set to  0.000000
7/15/2010	11:14:20 AM	Tube furnace set to 0
7/15/2010	11:14:21 AM	Run finished at 11:14 AM
7/15/2010	11:40:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/15/2010	11:40:38 AM	Recipe started at 11:40 AM
7/15/2010	11:40:38 AM	Helium valve closed
7/15/2010	11:40:38 AM	H2 valve closed
7/15/2010	11:40:38 AM	BCl3 valve closed
7/15/2010	11:40:38 AM	PH3 valve closed
7/15/2010	11:40:38 AM	SiCl4 pre valve closed
7/15/2010	11:40:38 AM	SiCl4 post valve closed
7/15/2010	11:40:38 AM	Main Vac valve closed
7/15/2010	11:40:38 AM	Bubbler valve closed
7/15/2010	11:40:38 AM	Bypass valve opened
7/15/2010	11:40:38 AM	Helium MFC set to  0.000000
7/15/2010	11:40:38 AM	H2 MFC set to  0.000000
7/15/2010	11:40:38 AM	BCl3 MFC set to  0.000000
7/15/2010	11:40:38 AM	PHl3 MFC set to  0.000000
7/15/2010	11:40:38 AM	SiCl4 MFC set to  0.000000
7/15/2010	11:40:38 AM	Bypass solenoid MFC set to  0.000000
7/15/2010	11:40:38 AM	Tube furnace set to 0
7/15/2010	11:41:14 AM	Helium valve closed
7/15/2010	11:41:14 AM	H2 valve closed
7/15/2010	11:41:14 AM	BCl3 valve closed
7/15/2010	11:41:14 AM	PH3 valve closed
7/15/2010	11:41:14 AM	SiCl4 pre valve closed
7/15/2010	11:41:14 AM	SiCl4 post valve closed
7/15/2010	11:41:14 AM	Bubbler valve closed
7/15/2010	11:41:14 AM	Main Vac valve opened
7/15/2010	11:41:14 AM	Bypass valve opened
7/15/2010	11:41:14 AM	Helium MFC set to  0.000000
7/15/2010	11:41:14 AM	H2 MFC set to  0.000000
7/15/2010	11:41:14 AM	BCl3 MFC set to  0.000000
7/15/2010	11:41:14 AM	PHl3 MFC set to  0.000000
7/15/2010	11:41:14 AM	SiCl4 MFC set to  0.000000
7/15/2010	11:41:14 AM	Bypass solenoid MFC set to  0.000000
7/15/2010	11:41:14 AM	Tube furnace set to 0
7/15/2010	11:42:14 AM	H2 valve closed
7/15/2010	11:42:14 AM	BCl3 valve closed
7/15/2010	11:42:14 AM	PH3 valve closed
7/15/2010	11:42:14 AM	SiCl4 pre valve closed
7/15/2010	11:42:14 AM	SiCl4 post valve closed
7/15/2010	11:42:14 AM	Bubbler valve closed
7/15/2010	11:42:14 AM	Helium valve opened
7/15/2010	11:42:14 AM	Main Vac valve opened
7/15/2010	11:42:14 AM	Bypass valve opened
7/15/2010	11:42:14 AM	Helium MFC set to  100.000000
7/15/2010	11:42:14 AM	H2 MFC set to  0.000000
7/15/2010	11:42:14 AM	BCl3 MFC set to  0.000000
7/15/2010	11:42:14 AM	PHl3 MFC set to  0.000000
7/15/2010	11:42:14 AM	SiCl4 MFC set to  0.000000
7/15/2010	11:42:14 AM	Bypass solenoid MFC set to  0.000000
7/15/2010	11:42:14 AM	Tube furnace set to 0
7/15/2010	11:51:14 AM	Helium valve closed
7/15/2010	11:51:14 AM	H2 valve closed
7/15/2010	11:51:14 AM	BCl3 valve closed
7/15/2010	11:51:14 AM	PH3 valve closed
7/15/2010	11:51:14 AM	SiCl4 pre valve closed
7/15/2010	11:51:14 AM	SiCl4 post valve closed
7/15/2010	11:51:14 AM	Bubbler valve closed
7/15/2010	11:51:14 AM	Main Vac valve opened
7/15/2010	11:51:14 AM	Bypass valve opened
7/15/2010	11:51:14 AM	Helium MFC set to  0.000000
7/15/2010	11:51:14 AM	H2 MFC set to  0.000000
7/15/2010	11:51:14 AM	BCl3 MFC set to  0.000000
7/15/2010	11:51:14 AM	PHl3 MFC set to  0.000000
7/15/2010	11:51:14 AM	SiCl4 MFC set to  0.000000
7/15/2010	11:51:14 AM	Bypass solenoid MFC set to  0.000000
7/15/2010	11:51:14 AM	Tube furnace set to 0
7/15/2010	11:52:14 AM	H2 valve closed
7/15/2010	11:52:14 AM	BCl3 valve closed
7/15/2010	11:52:14 AM	PH3 valve closed
7/15/2010	11:52:14 AM	SiCl4 pre valve closed
7/15/2010	11:52:14 AM	SiCl4 post valve closed
7/15/2010	11:52:14 AM	Bubbler valve closed
7/15/2010	11:52:14 AM	Helium valve opened
7/15/2010	11:52:14 AM	Main Vac valve opened
7/15/2010	11:52:14 AM	Bypass valve opened
7/15/2010	11:52:14 AM	Helium MFC set to  100.000000
7/15/2010	11:52:14 AM	H2 MFC set to  0.000000
7/15/2010	11:52:14 AM	BCl3 MFC set to  0.000000
7/15/2010	11:52:14 AM	PHl3 MFC set to  0.000000
7/15/2010	11:52:14 AM	SiCl4 MFC set to  0.000000
7/15/2010	11:52:14 AM	Bypass solenoid MFC set to  0.000000
7/15/2010	11:52:14 AM	Tube furnace set to 0
7/15/2010	12:01:14 PM	Helium valve closed
7/15/2010	12:01:14 PM	H2 valve closed
7/15/2010	12:01:14 PM	BCl3 valve closed
7/15/2010	12:01:14 PM	PH3 valve closed
7/15/2010	12:01:14 PM	SiCl4 pre valve closed
7/15/2010	12:01:14 PM	SiCl4 post valve closed
7/15/2010	12:01:14 PM	Bubbler valve closed
7/15/2010	12:01:14 PM	Main Vac valve opened
7/15/2010	12:01:14 PM	Bypass valve opened
7/15/2010	12:01:14 PM	Helium MFC set to  0.000000
7/15/2010	12:01:14 PM	H2 MFC set to  0.000000
7/15/2010	12:01:14 PM	BCl3 MFC set to  0.000000
7/15/2010	12:01:14 PM	PHl3 MFC set to  0.000000
7/15/2010	12:01:14 PM	SiCl4 MFC set to  0.000000
7/15/2010	12:01:14 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	12:01:15 PM	Tube furnace set to 0
7/15/2010	12:02:15 PM	H2 valve closed
7/15/2010	12:02:15 PM	BCl3 valve closed
7/15/2010	12:02:15 PM	PH3 valve closed
7/15/2010	12:02:15 PM	SiCl4 pre valve closed
7/15/2010	12:02:15 PM	SiCl4 post valve closed
7/15/2010	12:02:15 PM	Bubbler valve closed
7/15/2010	12:02:15 PM	Helium valve opened
7/15/2010	12:02:15 PM	Main Vac valve opened
7/15/2010	12:02:15 PM	Bypass valve opened
7/15/2010	12:02:15 PM	Helium MFC set to  100.000000
7/15/2010	12:02:15 PM	H2 MFC set to  0.000000
7/15/2010	12:02:15 PM	BCl3 MFC set to  0.000000
7/15/2010	12:02:15 PM	PHl3 MFC set to  0.000000
7/15/2010	12:02:15 PM	SiCl4 MFC set to  0.000000
7/15/2010	12:02:15 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	12:02:15 PM	Tube furnace set to 0
7/15/2010	12:11:15 PM	Helium valve closed
7/15/2010	12:11:15 PM	H2 valve closed
7/15/2010	12:11:15 PM	BCl3 valve closed
7/15/2010	12:11:15 PM	PH3 valve closed
7/15/2010	12:11:15 PM	SiCl4 pre valve closed
7/15/2010	12:11:15 PM	SiCl4 post valve closed
7/15/2010	12:11:15 PM	Bubbler valve closed
7/15/2010	12:11:15 PM	Main Vac valve opened
7/15/2010	12:11:15 PM	Bypass valve opened
7/15/2010	12:11:15 PM	Helium MFC set to  0.000000
7/15/2010	12:11:15 PM	H2 MFC set to  0.000000
7/15/2010	12:11:15 PM	BCl3 MFC set to  0.000000
7/15/2010	12:11:15 PM	PHl3 MFC set to  0.000000
7/15/2010	12:11:15 PM	SiCl4 MFC set to  0.000000
7/15/2010	12:11:15 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	12:11:15 PM	Tube furnace set to 0
7/15/2010	12:11:16 PM	Run finished at 12:11 PM
7/15/2010	12:11:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/15/2010	12:13:00 PM	Recipe started at 12:12 PM
7/15/2010	12:13:00 PM	Helium valve closed
7/15/2010	12:13:00 PM	BCl3 valve closed
7/15/2010	12:13:00 PM	PH3 valve closed
7/15/2010	12:13:00 PM	SiCl4 pre valve closed
7/15/2010	12:13:00 PM	SiCl4 post valve closed
7/15/2010	12:13:00 PM	Main Vac valve closed
7/15/2010	12:13:00 PM	Bypass valve closed
7/15/2010	12:13:00 PM	Bubbler valve closed
7/15/2010	12:13:00 PM	H2 valve opened
7/15/2010	12:13:00 PM	Helium MFC set to  0.000000
7/15/2010	12:13:00 PM	H2 MFC set to  500.000000
7/15/2010	12:13:00 PM	BCl3 MFC set to  0.000000
7/15/2010	12:13:00 PM	PHl3 MFC set to  0.000000
7/15/2010	12:13:00 PM	SiCl4 MFC set to  0.000000
7/15/2010	12:13:00 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	12:13:00 PM	Tube furnace set to 0
7/15/2010	12:14:20 PM	Helium valve closed
7/15/2010	12:14:20 PM	BCl3 valve closed
7/15/2010	12:14:20 PM	PH3 valve closed
7/15/2010	12:14:20 PM	SiCl4 pre valve closed
7/15/2010	12:14:20 PM	SiCl4 post valve closed
7/15/2010	12:14:20 PM	Main Vac valve closed
7/15/2010	12:14:20 PM	Bypass valve closed
7/15/2010	12:14:20 PM	H2 valve opened
7/15/2010	12:14:20 PM	Bubbler valve opened
7/15/2010	12:14:20 PM	Helium MFC set to  0.000000
7/15/2010	12:14:20 PM	H2 MFC set to  500.000000
7/15/2010	12:14:20 PM	BCl3 MFC set to  0.000000
7/15/2010	12:14:20 PM	PHl3 MFC set to  0.000000
7/15/2010	12:14:20 PM	SiCl4 MFC set to  0.000000
7/15/2010	12:14:20 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	12:14:21 PM	Tube furnace set to 1000
7/15/2010	12:34:20 PM	Helium valve closed
7/15/2010	12:34:21 PM	PH3 valve closed
7/15/2010	12:34:21 PM	Main Vac valve closed
7/15/2010	12:34:21 PM	Bypass valve closed
7/15/2010	12:34:21 PM	H2 valve opened
7/15/2010	12:34:21 PM	BCl3 valve opened
7/15/2010	12:34:21 PM	SiCl4 pre valve opened
7/15/2010	12:34:21 PM	SiCl4 post valve opened
7/15/2010	12:34:21 PM	Bubbler valve opened
7/15/2010	12:34:21 PM	Helium MFC set to  0.000000
7/15/2010	12:34:21 PM	H2 MFC set to  500.000000
7/15/2010	12:34:21 PM	BCl3 MFC set to  15.000000
7/15/2010	12:34:21 PM	PHl3 MFC set to  0.000000
7/15/2010	12:34:21 PM	SiCl4 MFC set to  50.000000
7/15/2010	12:34:21 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	12:34:21 PM	Tube furnace set to 1000
7/15/2010	12:44:21 PM	H2 valve closed
7/15/2010	12:44:21 PM	BCl3 valve closed
7/15/2010	12:44:21 PM	PH3 valve closed
7/15/2010	12:44:21 PM	SiCl4 pre valve closed
7/15/2010	12:44:21 PM	SiCl4 post valve closed
7/15/2010	12:44:21 PM	Main Vac valve closed
7/15/2010	12:44:21 PM	Bypass valve closed
7/15/2010	12:44:21 PM	Helium valve opened
7/15/2010	12:44:21 PM	Bubbler valve opened
7/15/2010	12:44:21 PM	Helium MFC set to  500.000000
7/15/2010	12:44:21 PM	H2 MFC set to  0.000000
7/15/2010	12:44:21 PM	BCl3 MFC set to  0.000000
7/15/2010	12:44:21 PM	PHl3 MFC set to  0.000000
7/15/2010	12:44:21 PM	SiCl4 MFC set to  0.000000
7/15/2010	12:44:21 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	12:44:21 PM	Tube furnace set to 0
7/15/2010	1:04:21 PM	Helium valve closed
7/15/2010	1:04:21 PM	H2 valve closed
7/15/2010	1:04:21 PM	BCl3 valve closed
7/15/2010	1:04:21 PM	PH3 valve closed
7/15/2010	1:04:21 PM	SiCl4 pre valve closed
7/15/2010	1:04:21 PM	SiCl4 post valve closed
7/15/2010	1:04:21 PM	Main Vac valve closed
7/15/2010	1:04:21 PM	Bypass valve closed
7/15/2010	1:04:21 PM	Bubbler valve closed
7/15/2010	1:04:21 PM	Helium MFC set to  0.000000
7/15/2010	1:04:21 PM	H2 MFC set to  0.000000
7/15/2010	1:04:21 PM	BCl3 MFC set to  0.000000
7/15/2010	1:04:21 PM	PHl3 MFC set to  0.000000
7/15/2010	1:04:21 PM	SiCl4 MFC set to  0.000000
7/15/2010	1:04:21 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	1:04:21 PM	Tube furnace set to 0
7/15/2010	1:04:21 PM	Run finished at 1:04 PM
7/15/2010	1:52:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2010	1:52:20 PM	Recipe started at 1:52 PM
7/15/2010	1:52:20 PM	H2 valve closed
7/15/2010	1:52:20 PM	BCl3 valve closed
7/15/2010	1:52:20 PM	PH3 valve closed
7/15/2010	1:52:20 PM	SiCl4 pre valve closed
7/15/2010	1:52:20 PM	SiCl4 post valve closed
7/15/2010	1:52:20 PM	Main Vac valve closed
7/15/2010	1:52:20 PM	Bypass valve closed
7/15/2010	1:52:20 PM	Bubbler valve closed
7/15/2010	1:52:20 PM	Helium valve opened
7/15/2010	1:52:20 PM	Helium MFC set to  500.000000
7/15/2010	1:52:20 PM	H2 MFC set to  0.000000
7/15/2010	1:52:20 PM	BCl3 MFC set to  0.000000
7/15/2010	1:52:20 PM	PHl3 MFC set to  0.000000
7/15/2010	1:52:20 PM	SiCl4 MFC set to  0.000000
7/15/2010	1:52:20 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	1:52:20 PM	Tube furnace set to 0
7/15/2010	1:52:29 PM	Helium valve closed
7/15/2010	1:52:29 PM	H2 valve closed
7/15/2010	1:52:29 PM	BCl3 valve closed
7/15/2010	1:52:29 PM	PH3 valve closed
7/15/2010	1:52:29 PM	SiCl4 pre valve closed
7/15/2010	1:52:29 PM	SiCl4 post valve closed
7/15/2010	1:52:29 PM	Main Vac valve closed
7/15/2010	1:52:29 PM	Bypass valve closed
7/15/2010	1:52:29 PM	Bubbler valve closed
7/15/2010	1:52:29 PM	Helium MFC set to  0.000000
7/15/2010	1:52:29 PM	H2 MFC set to  0.000000
7/15/2010	1:52:29 PM	BCl3 MFC set to  0.000000
7/15/2010	1:52:29 PM	PHl3 MFC set to  0.000000
7/15/2010	1:52:29 PM	SiCl4 MFC set to  0.000000
7/15/2010	1:52:29 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	1:52:29 PM	Tube furnace set to 0
7/15/2010	1:52:29 PM	Run finished at 1:52 PM
7/15/2010	1:52:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2010	1:58:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/15/2010	1:58:06 PM	Recipe started at 1:58 PM
7/15/2010	1:58:06 PM	Helium valve closed
7/15/2010	1:58:06 PM	H2 valve closed
7/15/2010	1:58:06 PM	BCl3 valve closed
7/15/2010	1:58:06 PM	PH3 valve closed
7/15/2010	1:58:06 PM	SiCl4 pre valve closed
7/15/2010	1:58:06 PM	SiCl4 post valve closed
7/15/2010	1:58:06 PM	Main Vac valve closed
7/15/2010	1:58:06 PM	Bubbler valve closed
7/15/2010	1:58:06 PM	Bypass valve opened
7/15/2010	1:58:06 PM	Helium MFC set to  0.000000
7/15/2010	1:58:06 PM	H2 MFC set to  0.000000
7/15/2010	1:58:06 PM	BCl3 MFC set to  0.000000
7/15/2010	1:58:06 PM	PHl3 MFC set to  0.000000
7/15/2010	1:58:06 PM	SiCl4 MFC set to  0.000000
7/15/2010	1:58:06 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	1:58:06 PM	Tube furnace set to 0
7/15/2010	1:58:41 PM	Helium valve closed
7/15/2010	1:58:41 PM	H2 valve closed
7/15/2010	1:58:41 PM	BCl3 valve closed
7/15/2010	1:58:41 PM	PH3 valve closed
7/15/2010	1:58:41 PM	SiCl4 pre valve closed
7/15/2010	1:58:41 PM	SiCl4 post valve closed
7/15/2010	1:58:41 PM	Bubbler valve closed
7/15/2010	1:58:41 PM	Main Vac valve opened
7/15/2010	1:58:41 PM	Bypass valve opened
7/15/2010	1:58:41 PM	Helium MFC set to  0.000000
7/15/2010	1:58:41 PM	H2 MFC set to  0.000000
7/15/2010	1:58:41 PM	BCl3 MFC set to  0.000000
7/15/2010	1:58:41 PM	PHl3 MFC set to  0.000000
7/15/2010	1:58:41 PM	SiCl4 MFC set to  0.000000
7/15/2010	1:58:41 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	1:58:41 PM	Tube furnace set to 0
7/15/2010	1:59:41 PM	H2 valve closed
7/15/2010	1:59:41 PM	BCl3 valve closed
7/15/2010	1:59:41 PM	PH3 valve closed
7/15/2010	1:59:41 PM	SiCl4 pre valve closed
7/15/2010	1:59:41 PM	SiCl4 post valve closed
7/15/2010	1:59:41 PM	Bubbler valve closed
7/15/2010	1:59:41 PM	Helium valve opened
7/15/2010	1:59:41 PM	Main Vac valve opened
7/15/2010	1:59:41 PM	Bypass valve opened
7/15/2010	1:59:41 PM	Helium MFC set to  100.000000
7/15/2010	1:59:41 PM	H2 MFC set to  0.000000
7/15/2010	1:59:41 PM	BCl3 MFC set to  0.000000
7/15/2010	1:59:41 PM	PHl3 MFC set to  0.000000
7/15/2010	1:59:41 PM	SiCl4 MFC set to  0.000000
7/15/2010	1:59:41 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	1:59:41 PM	Tube furnace set to 0
7/15/2010	2:08:41 PM	Helium valve closed
7/15/2010	2:08:41 PM	H2 valve closed
7/15/2010	2:08:41 PM	BCl3 valve closed
7/15/2010	2:08:41 PM	PH3 valve closed
7/15/2010	2:08:41 PM	SiCl4 pre valve closed
7/15/2010	2:08:41 PM	SiCl4 post valve closed
7/15/2010	2:08:41 PM	Bubbler valve closed
7/15/2010	2:08:41 PM	Main Vac valve opened
7/15/2010	2:08:41 PM	Bypass valve opened
7/15/2010	2:08:41 PM	Helium MFC set to  0.000000
7/15/2010	2:08:41 PM	H2 MFC set to  0.000000
7/15/2010	2:08:41 PM	BCl3 MFC set to  0.000000
7/15/2010	2:08:41 PM	PHl3 MFC set to  0.000000
7/15/2010	2:08:42 PM	SiCl4 MFC set to  0.000000
7/15/2010	2:08:42 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	2:08:42 PM	Tube furnace set to 0
7/15/2010	2:09:42 PM	H2 valve closed
7/15/2010	2:09:42 PM	BCl3 valve closed
7/15/2010	2:09:42 PM	PH3 valve closed
7/15/2010	2:09:42 PM	SiCl4 pre valve closed
7/15/2010	2:09:42 PM	SiCl4 post valve closed
7/15/2010	2:09:42 PM	Bubbler valve closed
7/15/2010	2:09:42 PM	Helium valve opened
7/15/2010	2:09:42 PM	Main Vac valve opened
7/15/2010	2:09:42 PM	Bypass valve opened
7/15/2010	2:09:42 PM	Helium MFC set to  100.000000
7/15/2010	2:09:42 PM	H2 MFC set to  0.000000
7/15/2010	2:09:42 PM	BCl3 MFC set to  0.000000
7/15/2010	2:09:42 PM	PHl3 MFC set to  0.000000
7/15/2010	2:09:42 PM	SiCl4 MFC set to  0.000000
7/15/2010	2:09:42 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	2:09:42 PM	Tube furnace set to 0
7/15/2010	2:18:42 PM	Helium valve closed
7/15/2010	2:18:42 PM	H2 valve closed
7/15/2010	2:18:42 PM	BCl3 valve closed
7/15/2010	2:18:42 PM	PH3 valve closed
7/15/2010	2:18:42 PM	SiCl4 pre valve closed
7/15/2010	2:18:42 PM	SiCl4 post valve closed
7/15/2010	2:18:42 PM	Bubbler valve closed
7/15/2010	2:18:42 PM	Main Vac valve opened
7/15/2010	2:18:42 PM	Bypass valve opened
7/15/2010	2:18:42 PM	Helium MFC set to  0.000000
7/15/2010	2:18:42 PM	H2 MFC set to  0.000000
7/15/2010	2:18:42 PM	BCl3 MFC set to  0.000000
7/15/2010	2:18:42 PM	PHl3 MFC set to  0.000000
7/15/2010	2:18:42 PM	SiCl4 MFC set to  0.000000
7/15/2010	2:18:42 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	2:18:42 PM	Tube furnace set to 0
7/15/2010	2:19:42 PM	H2 valve closed
7/15/2010	2:19:42 PM	BCl3 valve closed
7/15/2010	2:19:42 PM	PH3 valve closed
7/15/2010	2:19:42 PM	SiCl4 pre valve closed
7/15/2010	2:19:42 PM	SiCl4 post valve closed
7/15/2010	2:19:42 PM	Bubbler valve closed
7/15/2010	2:19:42 PM	Helium valve opened
7/15/2010	2:19:42 PM	Main Vac valve opened
7/15/2010	2:19:42 PM	Bypass valve opened
7/15/2010	2:19:42 PM	Helium MFC set to  100.000000
7/15/2010	2:19:42 PM	H2 MFC set to  0.000000
7/15/2010	2:19:42 PM	BCl3 MFC set to  0.000000
7/15/2010	2:19:42 PM	PHl3 MFC set to  0.000000
7/15/2010	2:19:42 PM	SiCl4 MFC set to  0.000000
7/15/2010	2:19:42 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	2:19:42 PM	Tube furnace set to 0
7/15/2010	2:28:42 PM	Helium valve closed
7/15/2010	2:28:42 PM	H2 valve closed
7/15/2010	2:28:42 PM	BCl3 valve closed
7/15/2010	2:28:42 PM	PH3 valve closed
7/15/2010	2:28:42 PM	SiCl4 pre valve closed
7/15/2010	2:28:42 PM	SiCl4 post valve closed
7/15/2010	2:28:42 PM	Bubbler valve closed
7/15/2010	2:28:42 PM	Main Vac valve opened
7/15/2010	2:28:42 PM	Bypass valve opened
7/15/2010	2:28:42 PM	Helium MFC set to  0.000000
7/15/2010	2:28:42 PM	H2 MFC set to  0.000000
7/15/2010	2:28:42 PM	BCl3 MFC set to  0.000000
7/15/2010	2:28:42 PM	PHl3 MFC set to  0.000000
7/15/2010	2:28:42 PM	SiCl4 MFC set to  0.000000
7/15/2010	2:28:42 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	2:28:42 PM	Tube furnace set to 0
7/15/2010	2:28:43 PM	Run finished at 2:28 PM
7/15/2010	2:28:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/15/2010	2:43:04 PM	Recipe started at 2:43 PM
7/15/2010	2:43:04 PM	Helium valve closed
7/15/2010	2:43:04 PM	BCl3 valve closed
7/15/2010	2:43:04 PM	PH3 valve closed
7/15/2010	2:43:04 PM	SiCl4 pre valve closed
7/15/2010	2:43:04 PM	SiCl4 post valve closed
7/15/2010	2:43:04 PM	Main Vac valve closed
7/15/2010	2:43:04 PM	Bypass valve closed
7/15/2010	2:43:04 PM	Bubbler valve closed
7/15/2010	2:43:04 PM	H2 valve opened
7/15/2010	2:43:04 PM	Helium MFC set to  0.000000
7/15/2010	2:43:04 PM	H2 MFC set to  500.000000
7/15/2010	2:43:04 PM	BCl3 MFC set to  0.000000
7/15/2010	2:43:04 PM	PHl3 MFC set to  0.000000
7/15/2010	2:43:04 PM	SiCl4 MFC set to  0.000000
7/15/2010	2:43:04 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	2:43:04 PM	Tube furnace set to 0
7/15/2010	2:44:24 PM	Helium valve closed
7/15/2010	2:44:24 PM	BCl3 valve closed
7/15/2010	2:44:24 PM	PH3 valve closed
7/15/2010	2:44:24 PM	SiCl4 pre valve closed
7/15/2010	2:44:24 PM	SiCl4 post valve closed
7/15/2010	2:44:24 PM	Main Vac valve closed
7/15/2010	2:44:24 PM	Bypass valve closed
7/15/2010	2:44:24 PM	H2 valve opened
7/15/2010	2:44:24 PM	Bubbler valve opened
7/15/2010	2:44:24 PM	Helium MFC set to  0.000000
7/15/2010	2:44:24 PM	H2 MFC set to  500.000000
7/15/2010	2:44:24 PM	BCl3 MFC set to  0.000000
7/15/2010	2:44:24 PM	PHl3 MFC set to  0.000000
7/15/2010	2:44:24 PM	SiCl4 MFC set to  0.000000
7/15/2010	2:44:24 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	2:44:24 PM	Tube furnace set to 1000
7/15/2010	3:04:24 PM	Helium valve closed
7/15/2010	3:04:24 PM	PH3 valve closed
7/15/2010	3:04:24 PM	Main Vac valve closed
7/15/2010	3:04:24 PM	Bypass valve closed
7/15/2010	3:04:24 PM	H2 valve opened
7/15/2010	3:04:24 PM	BCl3 valve opened
7/15/2010	3:04:24 PM	SiCl4 pre valve opened
7/15/2010	3:04:24 PM	SiCl4 post valve opened
7/15/2010	3:04:24 PM	Bubbler valve opened
7/15/2010	3:04:24 PM	Helium MFC set to  0.000000
7/15/2010	3:04:24 PM	H2 MFC set to  500.000000
7/15/2010	3:04:24 PM	BCl3 MFC set to  15.000000
7/15/2010	3:04:24 PM	PHl3 MFC set to  0.000000
7/15/2010	3:04:24 PM	SiCl4 MFC set to  50.000000
7/15/2010	3:04:24 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	3:04:24 PM	Tube furnace set to 1000
7/15/2010	3:16:24 PM	H2 valve closed
7/15/2010	3:16:24 PM	BCl3 valve closed
7/15/2010	3:16:24 PM	PH3 valve closed
7/15/2010	3:16:24 PM	SiCl4 pre valve closed
7/15/2010	3:16:24 PM	SiCl4 post valve closed
7/15/2010	3:16:24 PM	Main Vac valve closed
7/15/2010	3:16:24 PM	Bypass valve closed
7/15/2010	3:16:24 PM	Helium valve opened
7/15/2010	3:16:24 PM	Bubbler valve opened
7/15/2010	3:16:24 PM	Helium MFC set to  500.000000
7/15/2010	3:16:24 PM	H2 MFC set to  0.000000
7/15/2010	3:16:24 PM	BCl3 MFC set to  0.000000
7/15/2010	3:16:24 PM	PHl3 MFC set to  0.000000
7/15/2010	3:16:24 PM	SiCl4 MFC set to  0.000000
7/15/2010	3:16:24 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	3:16:24 PM	Tube furnace set to 0
7/15/2010	3:36:24 PM	Helium valve closed
7/15/2010	3:36:24 PM	H2 valve closed
7/15/2010	3:36:24 PM	BCl3 valve closed
7/15/2010	3:36:24 PM	PH3 valve closed
7/15/2010	3:36:24 PM	SiCl4 pre valve closed
7/15/2010	3:36:24 PM	SiCl4 post valve closed
7/15/2010	3:36:24 PM	Main Vac valve closed
7/15/2010	3:36:24 PM	Bypass valve closed
7/15/2010	3:36:24 PM	Bubbler valve closed
7/15/2010	3:36:24 PM	Helium MFC set to  0.000000
7/15/2010	3:36:24 PM	H2 MFC set to  0.000000
7/15/2010	3:36:24 PM	BCl3 MFC set to  0.000000
7/15/2010	3:36:24 PM	PHl3 MFC set to  0.000000
7/15/2010	3:36:24 PM	SiCl4 MFC set to  0.000000
7/15/2010	3:36:24 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	3:36:24 PM	Tube furnace set to 0
7/15/2010	3:36:25 PM	Run finished at 3:36 PM
7/15/2010	3:47:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/15/2010	3:47:43 PM	Recipe started at 3:47 PM
7/15/2010	3:47:43 PM	Helium valve closed
7/15/2010	3:47:43 PM	H2 valve closed
7/15/2010	3:47:43 PM	BCl3 valve closed
7/15/2010	3:47:43 PM	PH3 valve closed
7/15/2010	3:47:43 PM	SiCl4 pre valve closed
7/15/2010	3:47:43 PM	SiCl4 post valve closed
7/15/2010	3:47:43 PM	Main Vac valve closed
7/15/2010	3:47:43 PM	Bubbler valve closed
7/15/2010	3:47:43 PM	Bypass valve opened
7/15/2010	3:47:43 PM	Helium MFC set to  0.000000
7/15/2010	3:47:43 PM	H2 MFC set to  0.000000
7/15/2010	3:47:43 PM	BCl3 MFC set to  0.000000
7/15/2010	3:47:43 PM	PHl3 MFC set to  0.000000
7/15/2010	3:47:43 PM	SiCl4 MFC set to  0.000000
7/15/2010	3:47:43 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	3:47:43 PM	Tube furnace set to 0
7/15/2010	3:48:19 PM	Helium valve closed
7/15/2010	3:48:19 PM	H2 valve closed
7/15/2010	3:48:19 PM	BCl3 valve closed
7/15/2010	3:48:19 PM	PH3 valve closed
7/15/2010	3:48:19 PM	SiCl4 pre valve closed
7/15/2010	3:48:19 PM	SiCl4 post valve closed
7/15/2010	3:48:19 PM	Bubbler valve closed
7/15/2010	3:48:19 PM	Main Vac valve opened
7/15/2010	3:48:19 PM	Bypass valve opened
7/15/2010	3:48:19 PM	Helium MFC set to  0.000000
7/15/2010	3:48:19 PM	H2 MFC set to  0.000000
7/15/2010	3:48:19 PM	BCl3 MFC set to  0.000000
7/15/2010	3:48:19 PM	PHl3 MFC set to  0.000000
7/15/2010	3:48:19 PM	SiCl4 MFC set to  0.000000
7/15/2010	3:48:19 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	3:48:19 PM	Tube furnace set to 0
7/15/2010	3:49:19 PM	H2 valve closed
7/15/2010	3:49:19 PM	BCl3 valve closed
7/15/2010	3:49:19 PM	PH3 valve closed
7/15/2010	3:49:19 PM	SiCl4 pre valve closed
7/15/2010	3:49:19 PM	SiCl4 post valve closed
7/15/2010	3:49:19 PM	Bubbler valve closed
7/15/2010	3:49:19 PM	Helium valve opened
7/15/2010	3:49:19 PM	Main Vac valve opened
7/15/2010	3:49:19 PM	Bypass valve opened
7/15/2010	3:49:19 PM	Helium MFC set to  100.000000
7/15/2010	3:49:19 PM	H2 MFC set to  0.000000
7/15/2010	3:49:19 PM	BCl3 MFC set to  0.000000
7/15/2010	3:49:19 PM	PHl3 MFC set to  0.000000
7/15/2010	3:49:19 PM	SiCl4 MFC set to  0.000000
7/15/2010	3:49:19 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	3:49:19 PM	Tube furnace set to 0
7/15/2010	3:58:19 PM	Helium valve closed
7/15/2010	3:58:19 PM	H2 valve closed
7/15/2010	3:58:19 PM	BCl3 valve closed
7/15/2010	3:58:19 PM	PH3 valve closed
7/15/2010	3:58:19 PM	SiCl4 pre valve closed
7/15/2010	3:58:19 PM	SiCl4 post valve closed
7/15/2010	3:58:19 PM	Bubbler valve closed
7/15/2010	3:58:19 PM	Main Vac valve opened
7/15/2010	3:58:19 PM	Bypass valve opened
7/15/2010	3:58:19 PM	Helium MFC set to  0.000000
7/15/2010	3:58:19 PM	H2 MFC set to  0.000000
7/15/2010	3:58:19 PM	BCl3 MFC set to  0.000000
7/15/2010	3:58:19 PM	PHl3 MFC set to  0.000000
7/15/2010	3:58:19 PM	SiCl4 MFC set to  0.000000
7/15/2010	3:58:19 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	3:58:19 PM	Tube furnace set to 0
7/15/2010	3:59:19 PM	H2 valve closed
7/15/2010	3:59:19 PM	BCl3 valve closed
7/15/2010	3:59:19 PM	PH3 valve closed
7/15/2010	3:59:19 PM	SiCl4 pre valve closed
7/15/2010	3:59:19 PM	SiCl4 post valve closed
7/15/2010	3:59:19 PM	Bubbler valve closed
7/15/2010	3:59:19 PM	Helium valve opened
7/15/2010	3:59:19 PM	Main Vac valve opened
7/15/2010	3:59:19 PM	Bypass valve opened
7/15/2010	3:59:19 PM	Helium MFC set to  100.000000
7/15/2010	3:59:19 PM	H2 MFC set to  0.000000
7/15/2010	3:59:19 PM	BCl3 MFC set to  0.000000
7/15/2010	3:59:19 PM	PHl3 MFC set to  0.000000
7/15/2010	3:59:19 PM	SiCl4 MFC set to  0.000000
7/15/2010	3:59:19 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	3:59:19 PM	Tube furnace set to 0
7/15/2010	4:08:19 PM	Helium valve closed
7/15/2010	4:08:19 PM	H2 valve closed
7/15/2010	4:08:19 PM	BCl3 valve closed
7/15/2010	4:08:19 PM	PH3 valve closed
7/15/2010	4:08:19 PM	SiCl4 pre valve closed
7/15/2010	4:08:19 PM	SiCl4 post valve closed
7/15/2010	4:08:19 PM	Bubbler valve closed
7/15/2010	4:08:19 PM	Main Vac valve opened
7/15/2010	4:08:19 PM	Bypass valve opened
7/15/2010	4:08:19 PM	Helium MFC set to  0.000000
7/15/2010	4:08:19 PM	H2 MFC set to  0.000000
7/15/2010	4:08:19 PM	BCl3 MFC set to  0.000000
7/15/2010	4:08:19 PM	PHl3 MFC set to  0.000000
7/15/2010	4:08:19 PM	SiCl4 MFC set to  0.000000
7/15/2010	4:08:19 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	4:08:20 PM	Tube furnace set to 0
7/15/2010	4:09:20 PM	H2 valve closed
7/15/2010	4:09:20 PM	BCl3 valve closed
7/15/2010	4:09:20 PM	PH3 valve closed
7/15/2010	4:09:20 PM	SiCl4 pre valve closed
7/15/2010	4:09:20 PM	SiCl4 post valve closed
7/15/2010	4:09:20 PM	Bubbler valve closed
7/15/2010	4:09:20 PM	Helium valve opened
7/15/2010	4:09:20 PM	Main Vac valve opened
7/15/2010	4:09:20 PM	Bypass valve opened
7/15/2010	4:09:20 PM	Helium MFC set to  100.000000
7/15/2010	4:09:20 PM	H2 MFC set to  0.000000
7/15/2010	4:09:20 PM	BCl3 MFC set to  0.000000
7/15/2010	4:09:20 PM	PHl3 MFC set to  0.000000
7/15/2010	4:09:20 PM	SiCl4 MFC set to  0.000000
7/15/2010	4:09:20 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	4:09:20 PM	Tube furnace set to 0
7/15/2010	4:18:20 PM	Helium valve closed
7/15/2010	4:18:20 PM	H2 valve closed
7/15/2010	4:18:20 PM	BCl3 valve closed
7/15/2010	4:18:20 PM	PH3 valve closed
7/15/2010	4:18:20 PM	SiCl4 pre valve closed
7/15/2010	4:18:20 PM	SiCl4 post valve closed
7/15/2010	4:18:20 PM	Bubbler valve closed
7/15/2010	4:18:20 PM	Main Vac valve opened
7/15/2010	4:18:20 PM	Bypass valve opened
7/15/2010	4:18:20 PM	Helium MFC set to  0.000000
7/15/2010	4:18:20 PM	H2 MFC set to  0.000000
7/15/2010	4:18:20 PM	BCl3 MFC set to  0.000000
7/15/2010	4:18:20 PM	PHl3 MFC set to  0.000000
7/15/2010	4:18:20 PM	SiCl4 MFC set to  0.000000
7/15/2010	4:18:20 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	4:18:20 PM	Tube furnace set to 0
7/15/2010	4:18:21 PM	Run finished at 4:18 PM
7/15/2010	4:18:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/15/2010	4:19:46 PM	Recipe started at 4:19 PM
7/15/2010	4:19:46 PM	Helium valve closed
7/15/2010	4:19:46 PM	BCl3 valve closed
7/15/2010	4:19:46 PM	PH3 valve closed
7/15/2010	4:19:46 PM	SiCl4 pre valve closed
7/15/2010	4:19:46 PM	SiCl4 post valve closed
7/15/2010	4:19:46 PM	Main Vac valve closed
7/15/2010	4:19:46 PM	Bypass valve closed
7/15/2010	4:19:46 PM	Bubbler valve closed
7/15/2010	4:19:46 PM	H2 valve opened
7/15/2010	4:19:46 PM	Helium MFC set to  0.000000
7/15/2010	4:19:46 PM	H2 MFC set to  500.000000
7/15/2010	4:19:46 PM	BCl3 MFC set to  0.000000
7/15/2010	4:19:46 PM	PHl3 MFC set to  0.000000
7/15/2010	4:19:46 PM	SiCl4 MFC set to  0.000000
7/15/2010	4:19:46 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	4:19:46 PM	Tube furnace set to 0
7/15/2010	4:21:04 PM	Helium valve closed
7/15/2010	4:21:04 PM	BCl3 valve closed
7/15/2010	4:21:04 PM	PH3 valve closed
7/15/2010	4:21:04 PM	SiCl4 pre valve closed
7/15/2010	4:21:04 PM	SiCl4 post valve closed
7/15/2010	4:21:04 PM	Main Vac valve closed
7/15/2010	4:21:04 PM	Bypass valve closed
7/15/2010	4:21:04 PM	H2 valve opened
7/15/2010	4:21:04 PM	Bubbler valve opened
7/15/2010	4:21:04 PM	Helium MFC set to  0.000000
7/15/2010	4:21:04 PM	H2 MFC set to  500.000000
7/15/2010	4:21:04 PM	BCl3 MFC set to  0.000000
7/15/2010	4:21:04 PM	PHl3 MFC set to  0.000000
7/15/2010	4:21:04 PM	SiCl4 MFC set to  0.000000
7/15/2010	4:21:04 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	4:21:04 PM	Tube furnace set to 1000
7/15/2010	4:41:04 PM	Helium valve closed
7/15/2010	4:41:04 PM	BCl3 valve closed
7/15/2010	4:41:04 PM	PH3 valve closed
7/15/2010	4:41:04 PM	Main Vac valve closed
7/15/2010	4:41:04 PM	Bypass valve closed
7/15/2010	4:41:04 PM	H2 valve opened
7/15/2010	4:41:04 PM	SiCl4 pre valve opened
7/15/2010	4:41:04 PM	SiCl4 post valve opened
7/15/2010	4:41:04 PM	Bubbler valve opened
7/15/2010	4:41:04 PM	Helium MFC set to  0.000000
7/15/2010	4:41:04 PM	H2 MFC set to  500.000000
7/15/2010	4:41:04 PM	BCl3 MFC set to  0.000000
7/15/2010	4:41:04 PM	PHl3 MFC set to  0.000000
7/15/2010	4:41:04 PM	SiCl4 MFC set to  50.000000
7/15/2010	4:41:04 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	4:41:04 PM	Tube furnace set to 1000
7/15/2010	5:01:04 PM	H2 valve closed
7/15/2010	5:01:04 PM	BCl3 valve closed
7/15/2010	5:01:04 PM	PH3 valve closed
7/15/2010	5:01:04 PM	SiCl4 pre valve closed
7/15/2010	5:01:04 PM	SiCl4 post valve closed
7/15/2010	5:01:04 PM	Main Vac valve closed
7/15/2010	5:01:04 PM	Bypass valve closed
7/15/2010	5:01:04 PM	Helium valve opened
7/15/2010	5:01:04 PM	Bubbler valve opened
7/15/2010	5:01:04 PM	Helium MFC set to  500.000000
7/15/2010	5:01:04 PM	H2 MFC set to  0.000000
7/15/2010	5:01:04 PM	BCl3 MFC set to  0.000000
7/15/2010	5:01:04 PM	PHl3 MFC set to  0.000000
7/15/2010	5:01:04 PM	SiCl4 MFC set to  0.000000
7/15/2010	5:01:04 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	5:01:04 PM	Tube furnace set to 0
7/15/2010	5:21:04 PM	Helium valve closed
7/15/2010	5:21:04 PM	H2 valve closed
7/15/2010	5:21:04 PM	BCl3 valve closed
7/15/2010	5:21:04 PM	PH3 valve closed
7/15/2010	5:21:04 PM	SiCl4 pre valve closed
7/15/2010	5:21:04 PM	SiCl4 post valve closed
7/15/2010	5:21:04 PM	Main Vac valve closed
7/15/2010	5:21:04 PM	Bypass valve closed
7/15/2010	5:21:04 PM	Bubbler valve closed
7/15/2010	5:21:04 PM	Helium MFC set to  0.000000
7/15/2010	5:21:04 PM	H2 MFC set to  0.000000
7/15/2010	5:21:04 PM	BCl3 MFC set to  0.000000
7/15/2010	5:21:04 PM	PHl3 MFC set to  0.000000
7/15/2010	5:21:04 PM	SiCl4 MFC set to  0.000000
7/15/2010	5:21:04 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	5:21:05 PM	Tube furnace set to 0
7/15/2010	5:21:05 PM	Run finished at 5:21 PM
7/15/2010	9:24:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2010	9:24:28 PM	Recipe started at 9:24 PM
7/15/2010	9:24:28 PM	H2 valve closed
7/15/2010	9:24:28 PM	BCl3 valve closed
7/15/2010	9:24:28 PM	PH3 valve closed
7/15/2010	9:24:28 PM	SiCl4 pre valve closed
7/15/2010	9:24:28 PM	SiCl4 post valve closed
7/15/2010	9:24:28 PM	Main Vac valve closed
7/15/2010	9:24:28 PM	Bypass valve closed
7/15/2010	9:24:28 PM	Bubbler valve closed
7/15/2010	9:24:28 PM	Helium valve opened
7/15/2010	9:24:28 PM	Helium MFC set to  500.000000
7/15/2010	9:24:28 PM	H2 MFC set to  0.000000
7/15/2010	9:24:28 PM	BCl3 MFC set to  0.000000
7/15/2010	9:24:28 PM	PHl3 MFC set to  0.000000
7/15/2010	9:24:28 PM	SiCl4 MFC set to  0.000000
7/15/2010	9:24:28 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	9:24:28 PM	Tube furnace set to 0
7/15/2010	9:24:38 PM	Helium valve closed
7/15/2010	9:24:38 PM	H2 valve closed
7/15/2010	9:24:38 PM	BCl3 valve closed
7/15/2010	9:24:38 PM	PH3 valve closed
7/15/2010	9:24:38 PM	SiCl4 pre valve closed
7/15/2010	9:24:38 PM	SiCl4 post valve closed
7/15/2010	9:24:38 PM	Main Vac valve closed
7/15/2010	9:24:38 PM	Bypass valve closed
7/15/2010	9:24:38 PM	Bubbler valve closed
7/15/2010	9:24:38 PM	Helium MFC set to  0.000000
7/15/2010	9:24:38 PM	H2 MFC set to  0.000000
7/15/2010	9:24:38 PM	BCl3 MFC set to  0.000000
7/15/2010	9:24:38 PM	PHl3 MFC set to  0.000000
7/15/2010	9:24:38 PM	SiCl4 MFC set to  0.000000
7/15/2010	9:24:38 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	9:24:38 PM	Tube furnace set to 0
7/15/2010	9:24:38 PM	Run finished at 9:24 PM
7/15/2010	9:24:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2010	9:27:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2010	9:27:37 PM	Recipe started at 9:27 PM
7/15/2010	9:27:37 PM	Helium valve closed
7/15/2010	9:27:37 PM	H2 valve closed
7/15/2010	9:27:37 PM	BCl3 valve closed
7/15/2010	9:27:37 PM	PH3 valve closed
7/15/2010	9:27:37 PM	SiCl4 pre valve closed
7/15/2010	9:27:37 PM	SiCl4 post valve closed
7/15/2010	9:27:37 PM	Main Vac valve closed
7/15/2010	9:27:37 PM	Bubbler valve closed
7/15/2010	9:27:37 PM	Bypass valve opened
7/15/2010	9:27:37 PM	Helium MFC set to  0.000000
7/15/2010	9:27:37 PM	H2 MFC set to  0.000000
7/15/2010	9:27:37 PM	BCl3 MFC set to  0.000000
7/15/2010	9:27:37 PM	PHl3 MFC set to  0.000000
7/15/2010	9:27:37 PM	SiCl4 MFC set to  0.000000
7/15/2010	9:27:37 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	9:27:37 PM	Tube furnace set to 0
7/15/2010	9:28:11 PM	Helium valve closed
7/15/2010	9:28:11 PM	H2 valve closed
7/15/2010	9:28:11 PM	BCl3 valve closed
7/15/2010	9:28:11 PM	PH3 valve closed
7/15/2010	9:28:11 PM	SiCl4 pre valve closed
7/15/2010	9:28:11 PM	SiCl4 post valve closed
7/15/2010	9:28:11 PM	Bubbler valve closed
7/15/2010	9:28:11 PM	Main Vac valve opened
7/15/2010	9:28:11 PM	Bypass valve opened
7/15/2010	9:28:11 PM	Helium MFC set to  0.000000
7/15/2010	9:28:11 PM	H2 MFC set to  0.000000
7/15/2010	9:28:11 PM	BCl3 MFC set to  0.000000
7/15/2010	9:28:11 PM	PHl3 MFC set to  0.000000
7/15/2010	9:28:11 PM	SiCl4 MFC set to  0.000000
7/15/2010	9:28:11 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	9:28:11 PM	Tube furnace set to 0
7/15/2010	9:28:11 PM	Run finished at 9:28 PM
7/15/2010	9:28:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2010	11:33:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2010	11:33:38 PM	Recipe started at 11:33 PM
7/15/2010	11:33:38 PM	H2 valve closed
7/15/2010	11:33:38 PM	BCl3 valve closed
7/15/2010	11:33:38 PM	PH3 valve closed
7/15/2010	11:33:38 PM	SiCl4 pre valve closed
7/15/2010	11:33:38 PM	SiCl4 post valve closed
7/15/2010	11:33:38 PM	Main Vac valve closed
7/15/2010	11:33:38 PM	Bypass valve closed
7/15/2010	11:33:38 PM	Bubbler valve closed
7/15/2010	11:33:38 PM	Helium valve opened
7/15/2010	11:33:38 PM	Helium MFC set to  500.000000
7/15/2010	11:33:38 PM	H2 MFC set to  0.000000
7/15/2010	11:33:38 PM	BCl3 MFC set to  0.000000
7/15/2010	11:33:38 PM	PHl3 MFC set to  0.000000
7/15/2010	11:33:38 PM	SiCl4 MFC set to  0.000000
7/15/2010	11:33:38 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	11:33:38 PM	Tube furnace set to 0
7/15/2010	11:34:57 PM	Helium valve closed
7/15/2010	11:34:57 PM	H2 valve closed
7/15/2010	11:34:57 PM	BCl3 valve closed
7/15/2010	11:34:57 PM	PH3 valve closed
7/15/2010	11:34:57 PM	SiCl4 pre valve closed
7/15/2010	11:34:57 PM	SiCl4 post valve closed
7/15/2010	11:34:57 PM	Main Vac valve closed
7/15/2010	11:34:57 PM	Bypass valve closed
7/15/2010	11:34:57 PM	Bubbler valve closed
7/15/2010	11:34:57 PM	Helium MFC set to  0.000000
7/15/2010	11:34:57 PM	H2 MFC set to  0.000000
7/15/2010	11:34:57 PM	BCl3 MFC set to  0.000000
7/15/2010	11:34:57 PM	PHl3 MFC set to  0.000000
7/15/2010	11:34:57 PM	SiCl4 MFC set to  0.000000
7/15/2010	11:34:57 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	11:34:58 PM	Tube furnace set to 0
7/15/2010	11:34:58 PM	Run finished at 11:34 PM
7/15/2010	11:34:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2010	11:46:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2010	11:46:02 PM	Recipe started at 11:46 PM
7/15/2010	11:46:02 PM	Helium valve closed
7/15/2010	11:46:02 PM	H2 valve closed
7/15/2010	11:46:02 PM	BCl3 valve closed
7/15/2010	11:46:02 PM	PH3 valve closed
7/15/2010	11:46:02 PM	SiCl4 pre valve closed
7/15/2010	11:46:02 PM	SiCl4 post valve closed
7/15/2010	11:46:02 PM	Main Vac valve closed
7/15/2010	11:46:02 PM	Bubbler valve closed
7/15/2010	11:46:02 PM	Bypass valve opened
7/15/2010	11:46:02 PM	Helium MFC set to  0.000000
7/15/2010	11:46:02 PM	H2 MFC set to  0.000000
7/15/2010	11:46:02 PM	BCl3 MFC set to  0.000000
7/15/2010	11:46:02 PM	PHl3 MFC set to  0.000000
7/15/2010	11:46:02 PM	SiCl4 MFC set to  0.000000
7/15/2010	11:46:02 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	11:46:03 PM	Tube furnace set to 0
7/15/2010	11:46:37 PM	Helium valve closed
7/15/2010	11:46:37 PM	H2 valve closed
7/15/2010	11:46:37 PM	BCl3 valve closed
7/15/2010	11:46:37 PM	PH3 valve closed
7/15/2010	11:46:37 PM	SiCl4 pre valve closed
7/15/2010	11:46:37 PM	SiCl4 post valve closed
7/15/2010	11:46:37 PM	Bubbler valve closed
7/15/2010	11:46:37 PM	Main Vac valve opened
7/15/2010	11:46:37 PM	Bypass valve opened
7/15/2010	11:46:37 PM	Helium MFC set to  0.000000
7/15/2010	11:46:37 PM	H2 MFC set to  0.000000
7/15/2010	11:46:37 PM	BCl3 MFC set to  0.000000
7/15/2010	11:46:37 PM	PHl3 MFC set to  0.000000
7/15/2010	11:46:37 PM	SiCl4 MFC set to  0.000000
7/15/2010	11:46:37 PM	Bypass solenoid MFC set to  0.000000
7/15/2010	11:46:37 PM	Tube furnace set to 0
7/15/2010	11:46:38 PM	Run finished at 11:46 PM
7/15/2010	11:46:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
